Open AccessTenzoresistors based on silicon and SI/CAF2/SI on sapphire structures
Author(s) -
А. А. Величко,
V. A. Ilyushin,
Н. И. Филимонова,
A.U. Krupin,
A. V. Katsyuba
Publication year - 2018
Publication title -
doklady akademii nauk vyšej školy rossijskoj federacii/doklady akademii nauk vysšej školy rossii
Language(s) - English
Resource type - Journals
eISSN - 2658-3747
pISSN - 1727-2769
DOI - 10.17212/1727-2769-2018-2-30-39
Subject(s) - silicon , silicon on sapphire , sapphire , materials science , optoelectronics , engineering physics , optics , silicon on insulator , engineering , physics , laser