Open AccessPeculiarities of unbalanced MEMS operation
Author(s) -
V.P. Dragunov,
Dmitriy I. Ostertak,
Evgeniya Dragunova
Publication year - 2017
Publication title -
doklady akademii nauk vyšej školy rossijskoj federacii/doklady akademii nauk vysšej školy rossii
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2658-3747
pISSN - 1727-2769
DOI - 10.17212/1727-2769-2017-4-58-69
Subject(s) - microelectromechanical systems , computer science , engineering , materials science , nanotechnology