Open AccessFringing field effects influence on MEMS functioning
Author(s) -
Dragunov Valery,
Dorzhiev Vitaly
Publication year - 2016
Publication title -
doklady akademii nauk vyšej školy rossijskoj federacii/doklady akademii nauk vysšej školy rossii
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2658-3747
pISSN - 1727-2769
DOI - 10.17212/1727-2769-2016-1-48-61
Subject(s) - field (mathematics) , microelectromechanical systems , psychology , materials science , nanotechnology , mathematics , pure mathematics