Open AccessAn influence of the mobile electrode weight on functioning MEMS
Author(s) -
Dragunov Valeriy,
Dragunova Ludmila
Publication year - 2015
Publication title -
doklady akademii nauk vyšej školy rossijskoj federacii/doklady akademii nauk vysšej školy rossii
Language(s) - English
Resource type - Journals
eISSN - 2658-3747
pISSN - 1727-2769
DOI - 10.17212/1727-2769-2015-3-50-60
Subject(s) - microelectromechanical systems , electrode , materials science , computer science , optoelectronics , chemistry