Open AccessAnalysis of Multi Coil Induction Heating System for Semiconductor Processing
Author(s) -
Nabila Nisha,
K Vishwas,
K. Suryanarayana,
Rajaneesh Acharya
Publication year - 2016
Publication title -
international journal of innovative research in electrical, electronics, instrumentation and control engineering
Language(s) - English
Resource type - Journals
eISSN - 2321-5526
pISSN - 2321-2004
DOI - 10.17148/ijireeice/ncaee.2016.05
Subject(s) - induction heating , electromagnetic coil , semiconductor , induction coil , electrical engineering , computer science , engineering