Open AccessDesign and Simulation Studies on Linearised MEMS Capacitive Accelerometers with different Beam Springs
Author(s) -
M. Narayanaswamy,
R. Joseph Daniel,
E. Christy Sujeetha Mary
Publication year - 2019
Publication title -
international journal of innovative research in electrical, electronics, instrumentation and control engineering
Language(s) - English
Resource type - Journals
eISSN - 2321-5526
pISSN - 2321-2004
DOI - 10.17148/ijireeice.2019.7701
Subject(s) - accelerometer , spring (device) , capacitive sensing , beam (structure) , leaf spring , microelectromechanical systems , linearity , sensitivity (control systems) , coil spring , structural engineering , engineering , acoustics , materials science , computer science , electronic engineering , physics , electrical engineering , optoelectronics , operating system