Open AccessDesign and Simulation of MEMS Piezoresistive Pressure Sensor to Improve the Sensitivity
Author(s) -
Updesh Kumar,
N. Jagadesh Babu
Publication year - 2015
Publication title -
international journal of innovative research in electrical, electronics, instrumentation and control engineering
Language(s) - English
Resource type - Journals
eISSN - 2321-5526
pISSN - 2321-2004
DOI - 10.17148/ijireeice.2015.3335
Subject(s) - piezoresistive effect , microelectromechanical systems , sensitivity (control systems) , pressure sensor , materials science , computer science , electronic engineering , engineering , mechanical engineering , nanotechnology , optoelectronics