Open AccessPHYSICAL AND MECHANICAL PROPERTIES AND WEAR RESISTANCE OF CRN/ALN SYSTEM COATINGS DEPOSITED BY MAGNETRON SPUTTERING
Author(s) -
А. В. Аборкин,
В. Е. Ваганов,
М. И. Алымов,
A.I. El'kin,
И. М. Букарев
Publication year - 2017
Publication title -
izvestiâ vuzov. poroškovaâ metallurgiâ i funkcionalʹnye pokrytiâ
Language(s) - English
Resource type - Journals
eISSN - 2412-8767
pISSN - 1997-308X
DOI - 10.17073/1997-308x-2017-3-65-74
Subject(s) - materials science , sputter deposition , wear resistance , sputtering , metallurgy , cavity magnetron , high power impulse magnetron sputtering , physical vapor deposition , composite material , thin film , coating , nanotechnology