Open AccessModification of germanium surface exposed to radiation of a nanosecond ultraviolet laser
Author(s) -
V. Yu. Zheleznov,
T. V. Malinskiy,
S. I. Mikolutskiy,
В. Е. Рогалин,
С. А. Филин,
Yu. V. Khomich,
V. A. Yamshchikov,
И. А. Каплунов,
А. И. Иванова
Publication year - 2020
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2020-3-203-212
Subject(s) - materials science , etching (microfabrication) , scanning electron microscope , germanium , isotropic etching , optics , laser , dislocation , ultraviolet , irradiation , nanosecond , laser ablation , crystal (programming language) , optoelectronics , silicon , composite material , physics , layer (electronics) , computer science , nuclear physics , programming language