Open AccessOptimization of passivation in AlGaN/GaN heterostructure microwave transistor fabrication by ICP CVD
Author(s) -
A. A. Sleptsova,
С. В. Черных,
D. A. Podgorny,
Ilya A. Zhilnikov
Publication year - 2020
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2020-2-127-133
Subject(s) - passivation , optoelectronics , fabrication , materials science , microwave , heterojunction , transistor , nanotechnology , electrical engineering , computer science , telecommunications , engineering , layer (electronics) , medicine , voltage , alternative medicine , pathology