Determination of optical parameters of lithium niobate films by srectrophotometry

Lithium niobate films on silicon substrates were synthesized by high−frequency magnetron sputtering of a target. The resultant film was a layer of polycrystalline lithium niobate. By the method of spectrophotometry we obtained the spectral dependences of the reflectance in the wavelength range 300—700 nm at small angles of incidence. The angular dependence of p− and s− polarized light were measured for a discrete set of wavelengths from 300 to 700 nm increments of wavelength 50 nm and increments for angles of 1°. The values of the refractive indicies, film thickness and extinction coefficients were determined using a numerical method for solving inverse problems. As the film is absorbing we accepted the simulation optical system as an isotropic monolayer absorbing film on a semi-infinite absorbing substrate with a sharp interface. Initial approximation for the solution of inverse problems were defined by the methods based on the estimation of the interference extrema position in the reflection-angular spectra. Values of the refractive indicies of the film differ from the values typical for LiNbO3 single crystals obtained both from the reference literature, and by refractive indices direct goniometric method measurements of a certified standard enterprise sample (SES) made from a lithium niobate single crystal. We additionally studied the specimens with X−ray diffraction and scanning probe microscopy. These deviations are attributed to the film inhomogeneity, the presence of the second phase, and disordering of the structure. Inclusions of the second phase in the form of crystallites with a predominant orientation along the Z axis are observed.