Open AccessStructural formation aspects of Zn–containing nanoparticles synthesized by ion implantation in Si (001) followed by thermal annealing
Author(s) -
K. B. Eidelman,
Н. Ю. Табачкова,
К. Д. Щербачев,
Yu. N. Parkhomenko,
V. V. Privesentsev,
Д. М. Мигунов
Publication year - 2016
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2016-4-262-270
Subject(s) - ion implantation , annealing (glass) , materials science , nanoparticle , chemical engineering , silicon , thermal , ion , nanotechnology , metallurgy , chemistry , organic chemistry , engineering , physics , meteorology