Open AccessNANOSCALE CHARACTERIZATION OF CR, CU, AL AND NI METALLIC MAGNETRON NANOFILM MULTILAYERS ON SITALL
Author(s) -
A. P. Kuzmenko,
Naw Dint,
A. E. Kuz’ko,
Myo Min Than,
Thant Sin Win,
А. И. Колпаков
Publication year - 2018
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2016-3-195-203
Subject(s) - materials science , sputter deposition , cavity magnetron , grain size , nanoscopic scale , lattice constant , metal , ceramic , surface finish , surface roughness , alloy , analytical chemistry (journal) , diffraction , sputtering , nanotechnology , composite material , thin film , metallurgy , optics , chemistry , physics , chromatography