Open AccessTheoretical Investigation of Electronic and Structural Properties of AlN Thin Films
Author(s) -
К. К. Абгарян,
Д. И. Бажанов,
И. В. Мутигуллин
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2015-1-48-51
Subject(s) - materials science , thin film , engineering physics , nanotechnology , physics