Open AccessSynthesis of Porous Silicon with Silver Nanoparticles by Low–Energy Ion Implantation
Author(s) -
Р. Е. Баталов,
В. Ф. Валеев,
В. И. Нуждин,
V. V. Vorobev,
Ю. Н. Осин,
Д. В. Лебедев,
А. А. Бухараев,
А. Л. Степанов
Publication year - 2014
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2014-4-278-283
Subject(s) - materials science , ion implantation , wafer , porous silicon , silicon , scanning electron microscope , ion , amorphous solid , sputtering , analytical chemistry (journal) , ion track , nanotechnology , optoelectronics , thin film , composite material , chemistry , crystallography , organic chemistry , chromatography