Open AccessDiagnostics of Impurity Composition of High–Pure Monosilane by Results of the Analysis of a Test Silicon Single Crystal
Author(s) -
В. А. Гавва,
А. В. Гусев,
Т.V. Kotereva
Publication year - 2014
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2014-4-240-245
Subject(s) - impurity , silicon , ingot , analytical chemistry (journal) , boron , carbon fibers , materials science , polycrystalline silicon , silane , chemistry , chromatography , metallurgy , nanotechnology , organic chemistry , alloy , layer (electronics) , composite number , composite material , thin film transistor