Open AccessMethod of Determining Nondestructive Pulse Laser Annealing Modes for Dielectric and Semiconductor Wafers
Author(s) -
А. Ф. Коваленко,
А А Воробьев
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2014-3-206-210
Subject(s) - wafer , materials science , laser , semiconductor , dielectric , annealing (glass) , nondestructive testing , thermal , optics , semiconductor laser theory , elasticity (physics) , optoelectronics , composite material , thermodynamics , physics , quantum mechanics