Open AccessDetermination of Indium Arsenide Autoepitaxial Layer Thickness by Fourier–Transform Infrared Spectroscopy
Author(s) -
О. С. Комков,
Д. Д. Фирсов,
Е. А. Ковалишина,
А. С. Петров
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2014-3-194-198
Subject(s) - fourier transform infrared spectroscopy , fourier transform spectroscopy , indium arsenide , materials science , indium , infrared , fourier transform , layer (electronics) , gallium arsenide , spectroscopy , infrared spectroscopy , arsenide , analytical chemistry (journal) , optoelectronics , optics , chemistry , physics , nanotechnology , astronomy , environmental chemistry , organic chemistry , quantum mechanics