Open AccessSTRESS TOPOLOGY WITHIN SILICON SINGLE-CRYSTAL CANTILEVER BEAM
Author(s) -
A. P. Kuzmenko,
Д. И. Тимаков
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2014-1-53-57
Subject(s) - materials science , cantilever , silicon , flexural strength , composite material , deformation (meteorology) , brittleness , stress (linguistics) , beam (structure) , scattering , optics , physics , optoelectronics , linguistics , philosophy