Open AccessOXYGEN AND ERBIUM DISTRIBUTION IN DIFFUSION DOPED SILICON
Author(s) -
Н. А. Дроздов,
В. Латухина,
В. Степихова,
А. Покоева,
Alexey K. Surin
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2013-4-9-12
Subject(s) - silicon , doping , diffusion , oxygen , erbium , materials science , optoelectronics , chemistry , physics , thermodynamics , organic chemistry