Open AccessRESEARCH OF POSSIBILITIES FOR IMPROVING THE ENERGY AND MASS PARAMETERS OF SOLAR CELLS USING PLASMA-CHEMICAL ETCHING
Author(s) -
П. Б. Лагов,
А. С. Дренин,
Е. С. Роговский,
А. М. Леднев
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2013-3-51-53
Subject(s) - plasma , etching (microfabrication) , plasma etching , materials science , isotropic etching , engineering physics , nanotechnology , optoelectronics , chemical engineering , physics , engineering , layer (electronics) , quantum mechanics