Open AccessGradient Planar Optical Waveguides on the Basis of Fluorinated Silica Glasses Fabricated in Low Pressure Microwave Plasma
Author(s) -
П. Шилов,
Ю. Кочмарев,
Т. Ключник,
I. V. Iakovlev
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2012-4-59-64
Subject(s) - planar , materials science , microwave , pressure gradient , plasma , optics , optoelectronics , physics , computer graphics (images) , quantum mechanics , computer science , mechanics