Open AccessMONTE CARLO SIMULATION OF SILICON NANOCLUSTER FORMATION IN SILICON DIOXIDE
Author(s) -
Alexander N. Karpov,
Е. А. Михантьев,
Stanislav V. Usenkov,
Н. Л. Шварц
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2012-1-33-39
Subject(s) - silicon , monte carlo method , silicon dioxide , materials science , optoelectronics , metallurgy , mathematics , statistics