Open AccessINFL UENCE OF THE PROCESS PARAMETERS OF METAL MELTS SPUTTERING ON THE POWDER GRANULOMETRIC COMPOSITION AND SHAPE OF ITS PARTICLES
Author(s) -
П. А. Лыков,
В. Е. Рощин,
Е. И. Воробьев
Publication year - 2012
Publication title -
izvestiâ vysših učebnyh zavedenij. černaâ metallurgiâ
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.3
H-Index - 7
eISSN - 2410-2091
pISSN - 0368-0797
DOI - 10.17073/0368-0797-2012-6-21-23
Subject(s) - sputtering , composition (language) , metal , materials science , metallurgy , mineralogy , chemical engineering , chemistry , nanotechnology , engineering , art , thin film , literature