Open AccessInvestigation of the Si–B–C–N Thin Coatings Deposited Using Magnetron Sputtering of SiBC Targets
Author(s) -
Ф. В. Кирюханцев-Корнеев,
А. Н. Шевейко,
Е. А. Левашов,
Д. В. Штанский
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. cvetnaâ metallurgiâ/izvestiâ vuzov. cvetnaâ metallurgiâ
Language(s) - English
Resource type - Journals
eISSN - 2412-8783
pISSN - 0021-3438
DOI - 10.17073/0021-3438-2015-4-55-62
Subject(s) - sputter deposition , materials science , high power impulse magnetron sputtering , cavity magnetron , sputtering , thin film , optoelectronics , analytical chemistry (journal) , metallurgy , nanotechnology , chemistry , chromatography