Open AccessINVESTIGATION INTO ETCHING OF COPPER IN HYDRAZINE
Author(s) -
В. П. Артамонов,
В. В. Артамонов,
П. О. Быков,
Е. В. Жидкова,
Ж. Б. Елюбаев
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. cvetnaâ metallurgiâ/izvestiâ vuzov. cvetnaâ metallurgiâ
Language(s) - English
Resource type - Journals
eISSN - 2412-8783
pISSN - 0021-3438
DOI - 10.17073/0021-3438-2015-1-18-21
Subject(s) - hydrazine (antidepressant) , etching (microfabrication) , copper , nitrogen , materials science , chemistry , chemical engineering , metallurgy , nanotechnology , organic chemistry , chromatography , engineering , layer (electronics)