Open AccessComparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response
Author(s) -
Fikret Yıldız
Publication year - 2021
Publication title -
sakarya üniversitesi fen bilimleri enstitüsü dergisi/sakarya üniversitesi fen bilimleri enstitüsü dergisi
Language(s) - English
Resource type - Journals
eISSN - 2147-835X
pISSN - 1301-4048
DOI - 10.16984/saufenbilder.737982
Subject(s) - linearity , sensitivity (control systems) , diaphragm (acoustics) , displacement (psychology) , flexibility (engineering) , materials science , acoustics , microelectromechanical systems , deformation (meteorology) , structural engineering , mathematics , physics , engineering , electronic engineering , optoelectronics , vibration , composite material , psychology , statistics , psychotherapist