Open AccessStudy on Flow Balance Analysis for Semiconductor Photo Inline Equipment using Simulation Modeling Approach
Author(s) -
심영학,
Moonsu Lee
Publication year - 2012
Publication title -
rojiseutikseu yeongu/loji'seutigseu yeon'gu
Language(s) - English
Resource type - Journals
eISSN - 2713-6469
pISSN - 1229-3539
DOI - 10.15735/kls.2012.20.2.005
Subject(s) - balance (ability) , flow (mathematics) , computer science , mechanics , physics , medicine , physical medicine and rehabilitation