Open AccessA Survey Paper on Microelectro Mechanical Beam Filters and Design of Clamped-Free Beam Resonator
Author(s) -
K.Yuv araj B.Ravi Kumar
Publication year - 2014
Publication title -
international journal of innovative research in science engineering and technology/international journal of innovative research in science, engineering and technology
Language(s) - English
Resource type - Journals
eISSN - 2347-6710
pISSN - 2319-8753
DOI - 10.15680/ijirset.2014.0301032
Subject(s) - resonator , beam (structure) , materials science , optics , physics , optoelectronics