Open AccessPrototype Development for Automation of Semiconductor Layer Growth Using Epitaxy
Author(s) -
Shradha Tiwari Amrin Kaur Ishar
Publication year - 2016
Publication title -
international journal of advanced research in electrical, electronics and instrumentation engineering
Language(s) - English
Resource type - Journals
eISSN - 2320-3765
pISSN - 2278-8875
DOI - 10.15662/ijareeie.2016.0507010
Subject(s) - semiconductor , layer (electronics) , automation , epitaxy , materials science , development (topology) , engineering physics , computer science , optoelectronics , engineering , nanotechnology , mechanical engineering , mathematics , mathematical analysis