Open AccessINVESTIGATION ON EFFECT OF SURFACE ROUGHNESS PATTERN TO DYNAMIC PERFORMANCE OF MEMS RESONATORS IN VARIOUS TYPES OF GASES AND GAS RAREFACTION
Author(s) -
Nguyen Chi Cuong,
Lam Minh Thinh,
Phan Minh Truong,
Trinh Xuan Thang,
Ngô Võ Kế Thành,
Le Quoc Cuong
Publication year - 2021
Publication title -
vietnam journal of science and technology/science and technology
Language(s) - English
Resource type - Journals
eISSN - 2815-5874
pISSN - 2525-2518
DOI - 10.15625/2525-2518/59/5/15478
Subject(s) - rarefaction (ecology) , surface roughness , resonator , surface finish , viscosity , materials science , microelectromechanical systems , lubrication , mechanics , optics , composite material , nanotechnology , optoelectronics , physics , ecology , species diversity , biology
The average modified molecular gas lubrication (MMGL) equation, which is modified with pressure flow factors and effective viscosity, is utilized to analyze the squeeze film damping (SFD) on micro-beam resonators considering effect of surface roughness pattern in various types of gases and gas rarefaction. Then, effect of surface roughness pattern (film thickness ratio and Peklenik number) is discussed on the quality factor (Q-factor) of micro-beam resonators in various types of gases and gas rarefaction. Thus, effect of surface roughness pattern is significantly reduced as effective viscosity of gas decreases in higher mode of resonator and higher gas rarefaction.