Open AccessSize-dependent behavior of a MEMS microbeam under electrostatic actuation
Author(s) -
Cong Ich Le,
Quang Dung Tran,
Van Dung Lam,
Dinh Kien Nguyen
Publication year - 2022
Publication title -
vietnam journal of mechanics/mechanics
Language(s) - English
Resource type - Journals
eISSN - 2815-5882
pISSN - 0866-7136
DOI - 10.15625/0866-7136/16834
Subject(s) - microbeam , microelectromechanical systems , timoshenko beam theory , discretization , nonlinear system , beam (structure) , finite element method , voltage , materials science , mechanics , compliant mechanism , node (physics) , equations of motion , structural engineering , classical mechanics , physics , engineering , optics , mathematical analysis , mathematics , electrical engineering , nanotechnology , quantum mechanics
The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied using a nonlinear finite element procedure. Based on a refined third-order shear deformation theory and the modified couple stress theory (MCST), nonlinear differential equations of motion for the beam are derived from Hamilton’s principle, and they are transferred to a discretized form using a two-node beam element. Newton-Raphson based iterative procedure is used in conjunction with Newmark method to obtain the pull-in voltages and deflections of a clamped-clamped microbeam under electrostatic actuation. The influence of the axial force, applied voltage and material length scale parameter on the behavior of the beam is studied in detail and highlighted.