Open AccessDESIGN AND SIMULATION OF HIGH SENSITIVITY MEMS CANTILEVERS
Author(s) -
Srinivasa Rao Karumuri
Publication year - 2016
Publication title -
international journal of research in engineering and technology
Language(s) - English
Resource type - Journals
eISSN - 2321-7308
pISSN - 2319-1163
DOI - 10.15623/ijret.2016.0517012
Subject(s) - cantilever , microelectromechanical systems , sensitivity (control systems) , engineering , materials science , aerospace engineering , electronic engineering , nanotechnology