Open AccessThermal microelectromechanical sensor construction
Author(s) -
E.K. Kiselev,
Tetyana Krytska,
Nina Stroiteleva,
Константин Олегович Турышев
Publication year - 2019
Publication title -
eastern-european journal of enterprise technologies
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.268
H-Index - 24
eISSN - 1729-4061
pISSN - 1729-3774
DOI - 10.15587/1729-4061.2019.184443
Subject(s) - capacitance , microcontroller , electronic engineering , signal (programming language) , bridge circuit , electrical element , electronic circuit , computer science , materials science , electrical engineering , engineering , physics , voltage , electrode , quantum mechanics , programming language