Open AccessStudy of porous silicon surface by mass spectroscopy methods
Author(s) -
М. М. Берченко,
Валерій Юрійович Єрохов,
Stepan Nichkalo,
Євген Іванович Бережанський
Publication year - 2014
Publication title -
eastern-european journal of enterprise technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.268
H-Index - 24
eISSN - 1729-4061
pISSN - 1729-3774
DOI - 10.15587/1729-4061.2014.33550
Subject(s) - porous silicon , silicon , secondary ion mass spectrometry , hydrofluoric acid , etching (microfabrication) , materials science , analytical chemistry (journal) , reactive ion etching , substrate (aquarium) , mass spectrum , ion , layer (electronics) , chemistry , nanotechnology , metallurgy , organic chemistry , oceanography , geology