Characterization of Thermally Annealed Sb Implanted Fused Silica
Author(s) -
S. H. Morgan,
Zhejun Pan,
D. O. Henderson,
S. Y. Park,
R. A. Weeks,
R.H. Magruder,
R. A. Zuhr
Publication year - 1993
Publication title -
mrs proceedings
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1946-4274
pISSN - 0272-9172
DOI - 10.1557/proc-316-469
Subject(s) - materials science , annealing (glass) , ion , argon , analytical chemistry (journal) , ion implantation , oxide , metallurgy , atomic physics , chemistry , physics , quantum mechanics , chromatography
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