Open AccessSol-Gel Coatings on Acoustic Wave Devices: Thin Film Characterization and Chemical Sensor Development
Author(s) -
G.C. Frye,
C. Jeffrey Brinker,
Antonio J. Ricco,
Stephen J. Martin,
Janice Hilliard,
D.H. Doughty
Publication year - 1990
Publication title -
mrs proceedings
Language(s) - English
Resource type - Journals
eISSN - 1946-4274
pISSN - 0272-9172
DOI - 10.1557/proc-180-583
Subject(s) - materials science , adsorption , sol gel , selectivity , chemical engineering , porosity , oxide , thin film , silicate , microstructure , zeolite , ion exchange , inorganic chemistry , nanotechnology , ion , composite material , catalysis , organic chemistry , metallurgy , chemistry , engineering
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