Open AccessAssessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography
Author(s) -
Lizmarie Comenencia Ortiz,
David B. Heinz,
Ian B. Flader,
Anne L. Alter,
Dongsuk D. Shin,
Yunhan Chen,
Thomas W. Kenny,
W Kenny Thomas
Publication year - 2018
Publication title -
mrs communications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.751
H-Index - 31
eISSN - 2159-6859
pISSN - 2159-6867
DOI - 10.1557/mrc.2018.70
Subject(s) - materials science , fabrication , silicon , nanoscopic scale , nano , nanotechnology , optoelectronics , doping , composite material , alternative medicine , pathology , medicine
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