Open AccessTi–Si–C–N thin films grown by reactive arc evaporation from Ti3SiC2 cathodes
Author(s) -
Anders Eriksson,
Jianqiang Zhu,
Naureen Ghafoor,
Jens Jensen,
Grzegorz Greczyński,
Mats Johansson,
J. Sjölén,
Magnus Odén,
Lars Hultman,
Johanna Rosén
Publication year - 2011
Publication title -
journal of materials research/pratt's guide to venture capital sources
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.788
H-Index - 148
eISSN - 0884-2914
pISSN - 0884-1616
DOI - 10.1557/jmr.2011.10
Subject(s) - materials science , thin film , evaporation , cathode , arc (geometry) , metallurgy , chemical engineering , analytical chemistry (journal) , nanotechnology , chemistry , physics , geometry , mathematics , chromatography , engineering , thermodynamics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom