Growth and characterization of TiN/SiN(001) superlattice films | Zendy

Hans Söderberg | Zendy; Magnus Odén | Zendy; A. Flink | Zendy; Jens Birch | Zendy; Per O. Å. Persson | Zendy; Manfred Beckers | Zendy; Lars Hultman | Zendy

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Growth and characterization of TiN/SiN(001) superlattice films

Author(s) -

Hans Söderberg,

Magnus Odén,

A. Flink,

Jens Birch,

Per O. Å. Persson,

Manfred Beckers,

Lars Hultman

Publication year - 2007

Publication title -

journal of materials research/pratt's guide to venture capital sources

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.788

H-Index - 148

eISSN - 0884-2914

pISSN - 0884-1616

DOI - 10.1557/jmr.2007.0412

Subject(s) - materials science , tin , superlattice , transmission electron microscopy , amorphous solid , high resolution transmission electron microscopy , nanoindentation , electron diffraction , crystallography , analytical chemistry (journal) , epitaxy , elastic recoil detection , sputter deposition , sputtering , thin film , layer (electronics) , diffraction , metallurgy , composite material , nanotechnology , optoelectronics , optics , chemistry , physics , chromatography

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