Open AccessFabrication of ultrathin film capacitors by chemical solution deposition
Author(s) -
Geoff L. Brennecka,
Bruce A. Tuttle
Publication year - 2007
Publication title -
journal of materials research/pratt's guide to venture capital sources
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.788
H-Index - 148
eISSN - 0884-2914
pISSN - 0884-1616
DOI - 10.1557/jmr.2007.0371
Subject(s) - materials science , capacitor , dielectric , capacitance , ferroelectricity , fabrication , lead zirconate titanate , film capacitor , deposition (geology) , chemical bath deposition , thin film , layer (electronics) , optoelectronics , spin coating , nanotechnology , electrode , voltage , electrical engineering , alternative medicine , chemistry , pathology , engineering , biology , paleontology , medicine , sediment
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