Open AccessPreparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching
Author(s) -
Li-Chi Chen,
Yaogong Wang,
Wenjiang Wang,
Xiaoqin Ma,
Jingyuan Yang,
Xiaoning Zhang
Publication year - 2021
Publication title -
wuji cailiao xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.252
H-Index - 25
ISSN - 1000-324X
DOI - 10.15541/jim20200509
Subject(s) - materials science , porous silicon , silicon , etching (microfabrication) , isotropic etching , silicon nanowires , metal , nanowire , composite number , porosity , nanotechnology , chemical engineering , composite material , metallurgy , layer (electronics) , engineering