Open AccessCorrelation between Stacking Faults in Epitaxial Layers of 4H-SiC and Defects in 4H-SiC Substrate
Author(s) -
Y D Guo,
Tianhuan Peng,
Chunjun Liu,
Zhan-Wei Yang,
Zhen-Li Cai
Publication year - 2019
Publication title -
wuji cailiao xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.252
H-Index - 25
ISSN - 1000-324X
DOI - 10.15541/jim20180443
Subject(s) - materials science , stacking , epitaxy , substrate (aquarium) , stacking fault , optoelectronics , crystallography , composite material , layer (electronics) , nuclear magnetic resonance , dislocation , oceanography , physics , chemistry , geology