Open AccessStress Induced Microstructure Evolution of AlN: Er Film at Different Annealing Temperature
Author(s) -
Mingming Yang,
MO Ya-Juan,
Xiaodan Wang,
Zeng Xiong-Hui,
Xuehua Liu,
HUANG Jun,
Zhang Ji-Cai,
Jianfeng Wang,
XU Ke
Publication year - 2016
Publication title -
journal of inorganic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.252
H-Index - 25
ISSN - 1000-324X
DOI - 10.15541/jim20150399
Subject(s) - materials science , microstructure , annealing (glass) , composite material , stress (linguistics) , metallurgy , philosophy , linguistics
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