Open AccessNuclear Microanalysis Study of Surface Nanolayers in Gold-Silicon Structures
Author(s) -
V.I. Soroka,
S.O. Lebed,
M.G. Tolmachev,
O. Veselov
Publication year - 2013
Publication title -
ukrainian journal of physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 17
eISSN - 2071-0194
pISSN - 2071-0186
DOI - 10.15407/ujpe58.04.0311
Subject(s) - hydrofluoric acid , silicon , materials science , fluorine , etching (microfabrication) , layer (electronics) , microanalysis , analytical chemistry (journal) , surface layer , substrate (aquarium) , particle (ecology) , scanning electron microscope , nanotechnology , optoelectronics , composite material , chemistry , metallurgy , oceanography , chromatography , geology , organic chemistry