Silicon nanowire arrays synthesized using the modified MACE process: Integration into chemical sensors and solar cells | Zendy

Mykhailo Dusheіko | Zendy; Viktoriia Koval | Zendy; Tetyana Obukhova | Zendy

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Silicon nanowire arrays synthesized using the modified MACE process: Integration into chemical sensors and solar cells

Author(s) -

Mykhailo Dusheіko,

Viktoriia Koval,

Tetyana Obukhova

Publication year - 2022

Publication title -

semiconductor physics quantum electronics and optoelectronics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.185

H-Index - 2

eISSN - 1605-6582

pISSN - 1560-8034

DOI - 10.15407/spqeo25.01.058

Subject(s) - materials science , isotropic etching , silicon , etching (microfabrication) , nanotechnology , hydrogen peroxide , nanowire , optoelectronics , nanostructure , silicon nanowires , resistor , chemistry , electrical engineering , organic chemistry , engineering , layer (electronics) , voltage

In this work, the influence of the technological process for metal-assisted chemical etching on surface morphology and electrophysical properties of obtained nanostructures has been investigated. It has been demonstrated that the obtained structures with a high aspect ratio could be used both in sensors and solar cells. It has been shown that application of the metal-assisted chemical etching (MACE) process enables to significantly improve the short-circuit current density in silicon solar cells (up to 29 mA/cm2). Also, the possibility of detection of hydrogen peroxide and glucose (via enzymatic reaction) by resistor-like sensors with nanostructured silicon as the sensitive area has been demonstrated with the sensitivity up to 2.5…2.75 mA/V•%.

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