Open AccessPhotostimulated etching of germanium chalcogenide films
Author(s) -
V.A. Dan’ko
Publication year - 2012
Publication title -
semiconductor physics quantum electronics and optoelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.185
H-Index - 2
eISSN - 1605-6582
pISSN - 1560-8034
DOI - 10.15407/spqeo15.04.345
Subject(s) - germanium , chalcogenide , materials science , etching (microfabrication) , optoelectronics , dry etching , nanotechnology , silicon , layer (electronics)
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