Open AccessDistribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation
Author(s) -
V. I. Sugakov,
A. A. Chernyuk
Publication year - 2017
Publication title -
nuclear physics and atomic energy/âderna fìzika ta energetika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.378
H-Index - 8
eISSN - 2074-0565
pISSN - 1818-331X
DOI - 10.15407/jnpae2017.01.043
Subject(s) - impurity , vacancy defect , range (aeronautics) , ion , materials science , distribution (mathematics) , atomic physics , condensed matter physics , chemistry , physics , mathematics , organic chemistry , composite material , mathematical analysis