Open AccessThe Fabrication & Characterization of an Electrokinetic Microfluidic Pump from SU-8, a Negative Epoxy-Based Photoresist
Author(s) -
Nash Anderson
Publication year - 2016
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.15368/theses.2013.120
Subject(s) - microfluidics , photoresist , polydimethylsiloxane , electrokinetic phenomena , materials science , nanotechnology , epoxy , fabrication , microelectromechanical systems , curing (chemistry) , layer (electronics) , scanning electron microscope , optoelectronics , composite material , medicine , alternative medicine , pathology