Open AccessFABRICATION AND CHARACTERIZATION OF TORSIONAL MICRO-HINGE STRUCTURES
Author(s) -
Mike Madrid Marrujo
Publication year - 2016
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.15368/theses.2012.119
Subject(s) - hinge , actuator , wafer , materials science , fabrication , mechanical engineering , stress (linguistics) , microelectromechanical systems , etching (microfabrication) , stiffness , piezoelectricity , structural engineering , engineering , nanotechnology , composite material , electrical engineering , medicine , alternative medicine , pathology , linguistics , philosophy , layer (electronics)